Shutdown asml SNF 2008-11-17 01:06:51: Stepper error

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Nov 17 09:10:52 PST 2008


Robot could not pick up users wafer from send cassette(Could not sense wafer vacuum). Inspected the robot load arm and found some red residue(probably photoresist) that caused the wafer loading problem. It is unknown when the the arm got contaminated but has probably been causing some intermittant handling errors. Cleaned the residue off with acetone and wipes. Tested wafer loading by cycling 10 wafers through system. All OK. Also ran daily tests- All OK. System is ready for use. 




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