Comment asml SNF 2008-11-20 16:18:45: Update 11/20/08

gsosa at gsosa at
Thu Nov 20 16:18:45 PST 2008

The stepper is still down. The stone in and out problem has been fixed. However, the tool was open for a few hours and needs to stabilize. Also during the repair of the stone in/out, the stone position has changed. Tool will stabilize overnight and FSE will return to do complete metrology setup and re-baseline the system.  Many apologies for the extended downtime.

More information about the asml-pcs mailing list