Comment asml SNF 2008-11-19 17:57:52: The stepper is down

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Nov 21 15:43:13 PST 2008


The monthly PM is completed. The stone in/out problems have been resolved. All baseline setups have been completed(red / white light focus, red/blue and 3D align ) All systems OK. System is ready for use.




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