Shutdown asml SNF 2008-11-19 09:59:52: Monthly PM

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Nov 21 15:43:25 PST 2008


The monthly PM is completed. The stone in/out problems have been resolved. All baseline setups have been completed(red / white light focus, red/blue and 3D align ) All systems OK. System is ready for use.




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