Shutdown asml SNF 2008-11-21 18:23:22: Alignment Problems

gsosa at gsosa at
Fri Nov 21 22:02:27 PST 2008

Chris from ASML checked and updated Basic Machine constants for front and backside alignment. Verified front and backside alignment with users wafers. Alignment looked good. Thank you Joey Doll for providing us with wafers to verify integrity of both alignmnet systems. Will continue to monitor the system throughout the weekend so please report any issues that you encounter in Coral.  

More information about the asml-pcs mailing list