Shutdown asml SNF 2008-11-23 20:09:00: System Error

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Sun Nov 23 20:09:00 PST 2008


After successfully exposing 2:3 wafers, system gave error and aborted batch.  Wafer 1 is on robot, wafer 2 is on E-chuck, and wafer 3 was indicated to be on P-chuck.  After doing FAST system startup as tool suggested, wafer 3 "vanished."  Error log ssuggests that wafer was lost during transfer from P to E chucks.  All wafers are currently stuck inside the tool.
These wafers have been checked by Gary and successfully run through the tool before.




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