Shutdown asml SNF 2008-11-23 20:09:00: System Error

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Nov 24 09:14:16 PST 2008


Wafer take-over from robot to P/A failed (wafer not sensed). Retrieved stranded wafer and cleaned pre-aligner chuck, Re-tried users wafer 2 times with no success, Back of wafer looks OK and wafer floats on granite. Tried with maint test wafers- all handling OK. User wafer may be slightly warped. Did daily tests. System OK to use.




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