From mahnaz at snf.stanford.edu Wed Oct 1 09:34:32 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 1 Oct 2008 09:34:32 -0700 Subject: Shutdown asml SNF 2008-10-01 09:34:31: fse working on the stage Message-ID: From gsosa at snf.stanford.edu Wed Oct 1 13:07:57 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 1 Oct 2008 13:07:57 -0700 Subject: Shutdown asml SNF 2008-10-01 09:34:31: fse working on the stage Message-ID: FSE will continue working on stage at a later time. He needs to gather some additional hardware. System is stabilized and IQC test looks good. System up and ready to use. From fengj at snf.stanford.edu Thu Oct 2 17:14:28 2008 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Thu, 2 Oct 2008 17:14:28 -0700 Subject: Problem asml SNF 2008-10-02 17:14:27: Energy sensor temperature out of range Message-ID: Got this warning message and exposure was rejected. From rostam at snf.stanford.edu Mon Oct 6 19:21:38 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 6 Oct 2008 19:21:38 -0700 Subject: Problem asml SNF 2008-10-06 19:21:38: the machine miss-aligns my wafer by >10um Message-ID: I have 3 wafers that gone through exactly same process. The machine miss-aligns one of the wafers by 10 um always. I have tried this 3 times. From gsosa at snf.stanford.edu Wed Oct 8 08:43:24 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 8 Oct 2008 08:43:24 -0700 Subject: Shutdown asml SNF 2008-10-08 08:43:24: FSE working on tool Message-ID: The vendor is working on the stone in/out issues From gsosa at snf.stanford.edu Wed Oct 8 15:18:17 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 8 Oct 2008 15:18:17 -0700 Subject: Comment asml SNF 2008-10-08 15:18:15: System still stabilizing Message-ID: The temperature control unit is still stabilizing. We expect the stabilizing period to be completed by 5:30. From gsosa at snf.stanford.edu Wed Oct 8 18:22:31 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 8 Oct 2008 18:22:31 -0700 Subject: Shutdown asml SNF 2008-10-08 08:43:24: FSE working on tool Message-ID: FSE completed work at 10:30AM. Tool completed stabilizing at 5:30PM. Checked critical parameters with IQC test. All looks good. From gsosa at snf.stanford.edu Wed Oct 8 18:23:40 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 8 Oct 2008 18:23:40 -0700 Subject: Comment asml SNF 2008-10-08 18:23:39: Tool update Message-ID: The stepper is now stable and ready to use. Verified critical parameters with IQC test. From gsosa at snf.stanford.edu Tue Oct 14 09:03:55 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 14 Oct 2008 09:03:55 -0700 Subject: Shutdown asml SNF 2008-10-14 09:03:55: E Chuck Clean Message-ID: Vendor is cleaning the E-Chuck From gsosa at snf.stanford.edu Tue Oct 14 15:28:37 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 14 Oct 2008 15:28:37 -0700 Subject: Shutdown asml SNF 2008-10-14 09:03:55: E Chuck Clean Message-ID: Vendor completed E-chuck clean and did some of the scheduled monthly PM. Vendor will continue PM and lens transmission testing testing tomorrow. System up and ready to use. From gsosa at snf.stanford.edu Wed Oct 15 08:43:57 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 15 Oct 2008 08:43:57 -0700 Subject: Shutdown asml SNF 2008-10-15 08:43:56: Scheduled PM Message-ID: Vendor is doing a Monthly PM From gsosa at snf.stanford.edu Wed Oct 15 15:07:13 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 15 Oct 2008 15:07:13 -0700 Subject: Shutdown asml SNF 2008-10-15 08:43:56: Scheduled PM Message-ID: Vendor completed monthly PM. From masaharu at snf.stanford.edu Fri Oct 17 22:57:01 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Fri, 17 Oct 2008 22:57:01 -0700 Subject: Shutdown asml SNF 2008-10-17 22:57:00: wafer stuck Message-ID: I ran PM mark recipe with bare silicon wafer. However, the second wafer was stuck in E-chuck. I am sorry for the inconvenience. From gsosa at snf.stanford.edu Mon Oct 20 09:17:38 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 20 Oct 2008 09:17:38 -0700 Subject: Shutdown asml SNF 2008-10-17 22:57:00: wafer stuck Message-ID: Removed the stranded wafers from the stepper. The wafers looked clean and nothing unusual on backsides. Cleaned the robot arm, prealigner and centering device. Tested by cycling wafers. All OK. Did daily tests- all OK. From johana at snf.stanford.edu Thu Oct 23 13:05:53 2008 From: johana at snf.stanford.edu (johana at snf.stanford.edu) Date: Thu, 23 Oct 2008 13:05:53 -0700 Subject: Comment asml SNF 2008-10-23 13:05:51: Cassette error Message-ID: Cassette not put in correctly. Wafer handling re-initialization required. From gsosa at snf.stanford.edu Thu Oct 23 13:42:53 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 23 Oct 2008 13:42:53 -0700 Subject: Comment asml SNF 2008-10-23 13:05:51: Cassette error Message-ID: Reset the Wafer Handling CPU. Did a full startup of the tool. System initialized OK. From ykuo at snf.stanford.edu Thu Oct 30 07:08:13 2008 From: ykuo at snf.stanford.edu (ykuo at snf.stanford.edu) Date: Thu, 30 Oct 2008 07:08:13 -0700 Subject: Shutdown asml SNF 2008-10-30 07:08:12: wafers lost in ASML Message-ID: 2 wafers lost inside. The ASML reported error after finishing exposure of the first wafer. From gsosa at snf.stanford.edu Thu Oct 30 08:35:36 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 30 Oct 2008 08:35:36 -0700 Subject: Shutdown asml SNF 2008-10-30 07:08:12: wafers lost in ASML Message-ID: Wafer stranded at pre-aligner. Could not sense transfer between P/A chuck and centering chuck. Manually removed the wafers from system. Did full start-up. Wiped down P/A chuck, centering chuck and robot. Tested system operation by exposing 3 E-Zero wafers. All OK.