Problem asml SNF 2008-10-02 17:14:27: Energy sensor temperature out of range

fengj at snf.stanford.edu fengj at snf.stanford.edu
Thu Oct 2 17:14:28 PDT 2008

Previous message: Shutdown asml SNF 2008-10-01 09:34:31: fse working on the stage
Next message: Problem asml SNF 2008-10-06 19:21:38: the machine miss-aligns my wafer by >10um
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Got this warning message and exposure was rejected.

Previous message: Shutdown asml SNF 2008-10-01 09:34:31: fse working on the stage
Next message: Problem asml SNF 2008-10-06 19:21:38: the machine miss-aligns my wafer by >10um
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the asml-pcs mailing list