Problem asml SNF 2008-10-06 19:21:38: the machine miss-aligns my wafer by >10um

rostam at snf.stanford.edu rostam at snf.stanford.edu
Mon Oct 6 19:21:38 PDT 2008


I have 3 wafers that gone through exactly same process. The machine miss-aligns one of the wafers by 10 um always. I have tried this 3 times.




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