Shutdown asml SNF 2008-10-08 08:43:24: FSE working on tool

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Oct 8 18:22:31 PDT 2008

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FSE completed work at 10:30AM. Tool completed stabilizing at 5:30PM. Checked critical parameters with IQC test. All looks good.

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