Shutdown asml SNF 2008-10-17 22:57:00: wafer stuck

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Fri Oct 17 22:57:01 PDT 2008

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I ran PM mark recipe with bare silicon wafer.
However, the second wafer was stuck in E-chuck.
I am sorry for the inconvenience.

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