Shutdown asml SNF 2008-10-17 22:57:00: wafer stuck

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Oct 20 09:17:38 PDT 2008


Removed the stranded wafers from the stepper. The wafers looked clean and nothing unusual on backsides. Cleaned the robot arm, prealigner and centering device. Tested by cycling wafers. All OK. Did daily tests- all OK.




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