Shutdown asml SNF 2008-10-17 22:57:00: wafer stuck

gsosa at gsosa at
Mon Oct 20 09:17:38 PDT 2008

Removed the stranded wafers from the stepper. The wafers looked clean and nothing unusual on backsides. Cleaned the robot arm, prealigner and centering device. Tested by cycling wafers. All OK. Did daily tests- all OK.

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