Shutdown asml SNF 2008-10-30 07:08:12: wafers lost in ASML

[gsosa at snf.stanford.edu]

Wafer stranded at pre-aligner. Could not sense transfer between P/A chuck and centering chuck. Manually removed the wafers from system. Did full start-up. Wiped down P/A chuck, centering chuck and robot. Tested system operation by exposing 3 E-Zero wafers. All OK.