Shutdown asml SNF 2008-10-30 07:08:12: wafers lost in ASML

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Oct 30 08:35:36 PDT 2008


Wafer stranded at pre-aligner. Could not sense transfer between P/A chuck and centering chuck. Manually removed the wafers from system. Did full start-up. Wiped down P/A chuck, centering chuck and robot. Tested system operation by exposing 3 E-Zero wafers. All OK.




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