From gsosa at snf.stanford.edu Thu Apr 2 14:40:14 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 2 Apr 2009 14:40:14 -0700 Subject: Comment asml SNF 2009-04-02 14:40:13: Cleaned the E-Chuck 040209 Message-ID: Hotspot test indicated a hotspot near the edge of wafer. Cleaned the echuck and retested. Hotspot wafer looks good. From lindaohara at snf.stanford.edu Tue Apr 7 08:29:17 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 7 Apr 2009 08:29:17 -0700 Subject: Shutdown asml SNF 2009-04-07 08:29:16: Full Startup failed Message-ID: Wafer Stage Failed on full startup. From lindaohara at snf.stanford.edu Tue Apr 7 10:16:34 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 7 Apr 2009 10:16:34 -0700 Subject: Shutdown asml SNF 2009-04-07 08:29:16: Full Startup failed Message-ID: authorized remove wafer and system full startup. Okay to use. From yeh at snf.stanford.edu Wed Apr 8 14:11:41 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Wed, 8 Apr 2009 14:11:41 -0700 Subject: Comment asml SNF 2009-04-08 14:11:41: y-shift problem Message-ID: observing a roughly 5-10um shift in y-direction. maybe a machine problem. same job file worked 2 days ago without shift. From gsosa at snf.stanford.edu Wed Apr 8 14:15:12 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 8 Apr 2009 14:15:12 -0700 Subject: Comment asml SNF 2009-04-08 14:15:12: Hotspot 040709 Message-ID: 2 hotspots on hotspot test wafer at edge( 7 OClock and 3 Oclock). Cleaned the Echuck with tooling and retested. Hotspot wafer looks good. Ran IQC test- All OK. From yeh at snf.stanford.edu Wed Apr 8 17:18:49 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Wed, 8 Apr 2009 17:18:49 -0700 Subject: Problem asml SNF 2009-04-08 17:18:48: CT module error Message-ID: Can not load job file. When starting "Batch Control," machine responds with "CT module is not initialized. Do a startup to initialize CT module" error. Both Fast and Full Start-up attempts failed. Machine is not operational. From gsosa at snf.stanford.edu Thu Apr 9 08:24:40 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 9 Apr 2009 08:24:40 -0700 Subject: Shutdown asml SNF 2009-04-09 08:24:40: System stabilizing Message-ID: System lost communication with C&T. Cycled power on C&T unit. Shutdown all system hardware. Full shutdown of all software apps. Rebooted software and hardware. System initialization OK.System in stabilization due to no C&T control for 15 hours. System needs to stabilize until Noon before we test the system. From gsosa at snf.stanford.edu Thu Apr 9 15:53:58 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 9 Apr 2009 15:53:58 -0700 Subject: Comment asml SNF 2009-04-09 15:53:58: Update 4/9/09 Message-ID: The stepper will be down until tomorrow morning at which time we will check the system focus and make an update if needed. The system is out of focus by about 0.3 to 0.4 microns. Lens temperature is slowly stabilizing towards setpoint. Please check coral tomorrow for further updates. From gsosa at snf.stanford.edu Fri Apr 10 09:02:10 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 10 Apr 2009 09:02:10 -0700 Subject: Shutdown asml SNF 2009-04-09 08:24:40: System stabilizing Message-ID: System has stabilized over night. Checked visual and IQC focus. All OK. Focus is at 0.05 microns of nominal. Performed daily monitors- all ok. Hotspot test OK. System up and ready to use. From gsosa at snf.stanford.edu Fri Apr 10 09:02:18 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 10 Apr 2009 09:02:18 -0700 Subject: Problem asml SNF 2009-04-08 17:18:48: CT module error Message-ID: System has stabilized over night. Checked visual and IQC focus. All OK. Focus is at 0.05 microns of nominal. Performed daily monitors- all ok. Hotspot test OK. System up and ready to use. From mahnaz at snf.stanford.edu Mon Apr 13 14:55:49 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 13 Apr 2009 14:55:49 -0700 Subject: Comment asml SNF 2009-04-13 14:55:48: purge hood install Message-ID: As you know running thick resist on the system is problematic for stepper's lens. So it has been purposed to bring the system down on May 5th-6th to install the purge hood. I do have to mention that the system will not be up in those evening. From gsosa at snf.stanford.edu Tue Apr 14 18:08:03 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 14 Apr 2009 18:08:03 -0700 Subject: Comment asml SNF 2009-04-14 18:08:02: System OK 4/14 Message-ID: 3 power spikes causede stepper to power off 3 times. Did full power up sequence and started stepper applications. All system CPU's reset. Did full hardware initialization. All OK. Restarted and warmed up lamp. Ran daily test queue. lamp uniformity OK. All critical parameters in IQC test in spec. System OK to use. From lindaohara at snf.stanford.edu Thu Apr 16 09:07:08 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 16 Apr 2009 09:07:08 -0700 Subject: Problem asml SNF 2009-04-16 09:07:07: hotspot 2 locations Message-ID: hotspot 11 o'clock and 6 o'clock From lindaohara at snf.stanford.edu Thu Apr 16 12:50:37 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 16 Apr 2009 12:50:37 -0700 Subject: Problem asml SNF 2009-04-16 09:07:07: hotspot 2 locations Message-ID: FSE Cleaned e chuck. no hot spots From bchui at snf.stanford.edu Sat Apr 18 01:27:54 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 18 Apr 2009 01:27:54 -0700 Subject: Comment asml SNF 2009-04-18 01:27:54: GUI froze Message-ID: The main GUI screen froze after I tried to RUN some wafers while forgetting to close the output cassette cover. The stopwatch cursor showed, and all the buttons didn't work. Eventually, a fellow labmember used right-click EXIT to unfreeze the screen, and then we did a soft restart on the machine and it was OK again. From lindaohara at snf.stanford.edu Mon Apr 20 14:59:59 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Mon, 20 Apr 2009 14:59:59 -0700 Subject: Comment asml SNF 2009-04-20 14:59:59: System Ok to us Message-ID: IQC, Uniformity, and wafer handling checks ok From lindaohara at snf.stanford.edu Mon Apr 20 15:00:17 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Mon, 20 Apr 2009 15:00:17 -0700 Subject: Comment asml SNF 2009-04-20 14:59:59: System Ok to us Message-ID: From lindaohara at snf.stanford.edu Tue Apr 21 14:22:37 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 21 Apr 2009 14:22:37 -0700 Subject: Comment asml SNF 2009-04-21 14:22:37: hotspot 4/21/09 Message-ID: hotspot at 5 o'clock on wafer, fse cleaned echuck. no hotspot From gsosa at snf.stanford.edu Tue Apr 21 14:30:25 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 21 Apr 2009 14:30:25 -0700 Subject: Comment asml SNF 2009-04-21 14:22:37: hotspot 4/21/09 Message-ID: Hotspot test was done on 4/21/09 @ 7:30AM. FSE's cleaned the E-chuck at 9:00AM. Hotspot retest came out good. From gsosa at snf.stanford.edu Thu Apr 23 09:09:50 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 23 Apr 2009 09:09:50 -0700 Subject: Shutdown asml SNF 2009-04-23 09:09:50: ASML Training Class Message-ID: ASM-L using tool for a training class. From gsosa at snf.stanford.edu Thu Apr 23 11:13:43 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 23 Apr 2009 11:13:43 -0700 Subject: Comment asml SNF 2009-04-23 11:13:43: Tool is Stabilizing Message-ID: The ASML training class had the system open for over 2 hours. We need to let the tool stabilize for 2 hours before we check focus. If focus is in spec we will release the tool. Please cherck coral for tool updates. From gsosa at snf.stanford.edu Thu Apr 23 14:41:14 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 23 Apr 2009 14:41:14 -0700 Subject: Comment asml SNF 2009-04-23 11:13:43: Tool is Stabilizing Message-ID: Tool has stabilized. Ran IQC test. All critical parameters in spec. System ok and ready to use. From gsosa at snf.stanford.edu Thu Apr 23 14:41:21 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 23 Apr 2009 14:41:21 -0700 Subject: Shutdown asml SNF 2009-04-23 09:09:50: ASML Training Class Message-ID: Tool has stabilized. Ran IQC test. All critical parameters in spec. System ok and ready to use. From gsosa at snf.stanford.edu Thu Apr 23 14:41:39 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 23 Apr 2009 14:41:39 -0700 Subject: Comment asml SNF 2009-04-23 14:41:38: System is up Message-ID: Tool has stabilized. Ran IQC test. All critical parameters in spec. System ok and ready to use. From gsosa at snf.stanford.edu Fri Apr 24 15:43:35 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 24 Apr 2009 15:43:35 -0700 Subject: Comment asml SNF 2009-04-24 15:43:34: Stepper Update 4/24 Message-ID: Stepper is back up. ASML training completed for the week. IQC and hotspot test look good. If possible, please expose and inspect a test wafer before commiting all of you work. Please report any issues in Coral. From filip at snf.stanford.edu Sat Apr 25 20:15:31 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Sat, 25 Apr 2009 20:15:31 -0700 Subject: Comment asml SNF 2009-04-25 20:15:31: backside align Message-ID: is the backside align using PM marks enabled? It failed to align wafers that were aligned OK last week... Will retry Monday. From skoh at snf.stanford.edu Sun Apr 26 18:50:14 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Sun, 26 Apr 2009 18:50:14 -0700 Subject: Problem asml SNF 2009-04-26 18:50:13: Wafer Handler Error Message-ID: Appears to be the same problems as reported on 2/20 and 2/25. When trying to run a batch, gave error "Carrier inspection failed on Port 3" Did not manage to run my wafers despite trying several times. From skoh at snf.stanford.edu Sun Apr 26 20:05:51 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Sun, 26 Apr 2009 20:05:51 -0700 Subject: Problem asml SNF 2009-04-26 20:05:50: Wafer Stage Error Message-ID: After another user successfully ran 1 wafer, I managed to run another batch of 3 wafers. Subsequently, I was unable to run any more wafers. And fast/full startup failed to reinitialize the wafer stage. From gsosa at snf.stanford.edu Tue Apr 28 16:13:40 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 28 Apr 2009 16:13:40 -0700 Subject: Comment asml SNF 2009-04-28 16:13:39: System is up Message-ID: ASML is finished with PM and training. The tool is back up From gsosa at snf.stanford.edu Tue Apr 28 18:30:17 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 28 Apr 2009 18:30:17 -0700 Subject: Comment asml SNF 2009-04-28 18:30:16: Scheduled Downtime Note Message-ID: Hello Stepper Users... This note is to inform you that the stepper will be down on May 5th and 6th while ASML installs the purge hood upgrade. The purpose of this upgrade is to provide some protection to the bottom lens from outgassing photo resists, especially thicker resists that require a longer exposure time. The outgassing of the photo resist can contaminate the bottom lens, causing uniformity and intensity problems, which can translate to poor image quality. During this time, the stepper will not be available until work is completed on May 6th. This includes the evening of May 5th and the morning of May 6th. The work will begin on Tuesday, May 5th at 8:00AM. Please make alternate plans and schedule your time accordingly. Check on coral for further updates. Regards.. Gary