Comment asml SNF 2009-04-02 14:40:13: Cleaned the E-Chuck 040209

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Apr 2 14:40:14 PDT 2009


Hotspot test indicated a hotspot near the edge of wafer. Cleaned the echuck and retested. Hotspot wafer looks good.




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