Shutdown asml SNF 2009-04-07 08:29:16: Full Startup failed
lindaohara at snf.stanford.edu
lindaohara at snf.stanford.edu
Tue Apr 7 08:29:17 PDT 2009
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Comment asml SNF 2009-04-02 14:40:13: Cleaned the E-Chuck 040209
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Shutdown asml SNF 2009-04-07 08:29:16: Full Startup failed
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Wafer Stage Failed on full startup.
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Comment asml SNF 2009-04-02 14:40:13: Cleaned the E-Chuck 040209
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Shutdown asml SNF 2009-04-07 08:29:16: Full Startup failed
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