Comment asml SNF 2009-04-08 14:15:12: Hotspot 040709

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Apr 8 14:15:12 PDT 2009


2 hotspots on hotspot test wafer at edge( 7 OClock and 3 Oclock). Cleaned the Echuck with tooling and retested. Hotspot wafer looks good. Ran IQC test- All OK.




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