Comment asml SNF 2009-04-08 14:15:12: Hotspot 040709

gsosa at gsosa at
Wed Apr 8 14:15:12 PDT 2009

2 hotspots on hotspot test wafer at edge( 7 OClock and 3 Oclock). Cleaned the Echuck with tooling and retested. Hotspot wafer looks good. Ran IQC test- All OK.

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