Comment asml SNF 2009-04-09 15:53:58: Update 4/9/09

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Apr 9 15:53:58 PDT 2009


The stepper will be down until tomorrow morning at which time we will check the system focus and make an update if needed. The system is out of focus by about  0.3 to 0.4 microns. Lens temperature is slowly stabilizing towards setpoint. Please check coral tomorrow for further updates. 




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