Problem asml SNF 2009-04-08 17:18:48: CT module error

gsosa at gsosa at
Fri Apr 10 09:02:18 PDT 2009

System has stabilized over night. Checked visual and IQC focus. All OK. Focus is at  0.05 microns of nominal. Performed daily monitors- all ok. Hotspot test OK. System up and ready to use.

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