Comment asml SNF 2009-04-13 14:55:48: purge hood install

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Mon Apr 13 14:55:49 PDT 2009


As you know running thick resist on the system is problematic for stepper's lens.
So it has been purposed to bring the system down on May 5th-6th to install the purge hood.
I do have to mention that the system will not be up in those evening.




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