Comment asml SNF 2009-04-14 18:08:02: System OK 4/14

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Apr 14 18:08:03 PDT 2009


3 power spikes causede stepper to power off 3 times. Did full power up sequence and started stepper applications. All system CPU's reset. Did full hardware initialization. All OK. Restarted and warmed up lamp. Ran daily test queue. lamp uniformity OK. All critical parameters in IQC test in spec. System OK to use. 




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