Comment asml SNF 2009-04-23 11:13:43: Tool is Stabilizing

gsosa at gsosa at
Thu Apr 23 11:13:43 PDT 2009

The ASML training class had the system open for over 2 hours. We need to let the tool stabilize for 2 hours before we check focus. If focus is in spec we will release the tool. Please cherck coral for tool updates. 

More information about the asml-pcs mailing list