Comment asml SNF 2009-04-23 11:13:43: Tool is Stabilizing

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Apr 23 11:13:43 PDT 2009


The ASML training class had the system open for over 2 hours. We need to let the tool stabilize for 2 hours before we check focus. If focus is in spec we will release the tool. Please cherck coral for tool updates. 




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