Problem asml SNF 2009-04-26 18:50:13: Wafer Handler Error

skoh at skoh at
Sun Apr 26 18:50:14 PDT 2009

Appears to be the same problems as reported on 2/20 and 2/25.  When trying to run a batch, gave error "Carrier inspection failed on Port 3" Did not manage to run my wafers despite trying several times.

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