Problem asml SNF 2009-04-26 20:05:50: Wafer Stage Error

skoh at skoh at
Sun Apr 26 20:05:51 PDT 2009

After another user successfully ran 1 wafer, I managed to run another batch of 3 wafers.  Subsequently, I was unable to run any more wafers.  And fast/full startup failed to reinitialize the wafer stage.

More information about the asml-pcs mailing list