Problem asml SNF 2009-04-26 20:05:50: Wafer Stage Error

skoh at snf.stanford.edu skoh at snf.stanford.edu
Sun Apr 26 20:05:51 PDT 2009


After another user successfully ran 1 wafer, I managed to run another batch of 3 wafers.  Subsequently, I was unable to run any more wafers.  And fast/full startup failed to reinitialize the wafer stage.




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