Comment asml SNF 2009-04-28 16:13:39: System is up
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Tue Apr 28 16:13:40 PDT 2009
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Problem asml SNF 2009-04-26 20:05:50: Wafer Stage Error
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Comment asml SNF 2009-04-28 18:30:16: Scheduled Downtime Note
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ASML is finished with PM and training. The tool is back up
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Problem asml SNF 2009-04-26 20:05:50: Wafer Stage Error
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Comment asml SNF 2009-04-28 18:30:16: Scheduled Downtime Note
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