Comment asml SNF 2009-04-28 18:30:16: Scheduled Downtime Note

gsosa at gsosa at
Tue Apr 28 18:30:17 PDT 2009

Hello Stepper Users...
   This note is to inform you that the stepper will be down on May 5th and 6th while ASML installs the purge hood upgrade. The purpose of this upgrade is to provide some protection to the bottom lens from outgassing photo resists, especially thicker resists that require a longer exposure time. The outgassing of the photo resist can contaminate the bottom lens, causing uniformity and intensity problems, which can translate to poor image quality. During this time, the stepper will not be available until work is completed on May 6th. This includes the evening of May 5th and the morning of May 6th. The work will begin on Tuesday, May 5th at 8:00AM. Please make alternate plans and schedule your time accordingly. Check on coral for further updates.
   Regards.. Gary  

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