From iwjung at snf.stanford.edu Mon Aug 3 02:48:09 2009 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Mon, 3 Aug 2009 02:48:09 -0700 Subject: Problem asml SNF 2009-08-03 02:48:09: wafers stuck in input carrier Message-ID: Wafer handling error. Machine cannot initialize. Wants engineer to find wafer. Machine also lost reticle information. Cannot refresh reticle IDs. From iwjung at snf.stanford.edu Mon Aug 3 02:59:44 2009 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Mon, 3 Aug 2009 02:59:44 -0700 Subject: Shutdown asml SNF 2009-08-03 02:59:44: Wafer lost in machine error Message-ID: Needs engineer to recover lost wafer. There is only one wafer in the input cassette. No wafers elsewhere. From lindaohara at snf.stanford.edu Mon Aug 3 09:36:42 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Mon, 3 Aug 2009 09:36:42 -0700 Subject: Shutdown asml SNF 2009-08-03 02:59:44: Wafer lost in machine error Message-ID: From lindaohara at snf.stanford.edu Mon Aug 3 09:37:11 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Mon, 3 Aug 2009 09:37:11 -0700 Subject: Comment asml SNF 2009-08-03 09:37:10: Cleared wafer out ASML, ok to use Message-ID: From gsosa at snf.stanford.edu Mon Aug 3 15:25:06 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 3 Aug 2009 15:25:06 -0700 Subject: Problem asml SNF 2009-08-03 02:48:09: wafers stuck in input carrier Message-ID: System recovered by vendor From lindaohara at snf.stanford.edu Tue Aug 4 12:33:18 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 4 Aug 2009 12:33:18 -0700 Subject: Comment asml SNF 2009-08-04 12:33:17: Reservation Released from 12:30 -14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Aug 6 12:08:14 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 6 Aug 2009 12:08:14 -0700 Subject: Comment asml SNF 2009-08-06 12:08:13: Edge Sensor Repro Ok Message-ID: From lindaohara at snf.stanford.edu Thu Aug 6 12:08:36 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 6 Aug 2009 12:08:36 -0700 Subject: Shutdown asml SNF 2009-08-06 12:08:36: CT Stabilizing Message-ID: From lindaohara at snf.stanford.edu Thu Aug 6 12:09:45 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 6 Aug 2009 12:09:45 -0700 Subject: Comment asml SNF 2009-08-06 12:09:45: ASML Released Aug14th 9:00-1400 Message-ID: From gsosa at snf.stanford.edu Thu Aug 6 16:02:24 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 6 Aug 2009 16:02:24 -0700 Subject: Shutdown asml SNF 2009-08-06 12:08:36: CT Stabilizing Message-ID: THe C&T is still stabilizing. The IQC focus is currently +123 nanometers. We cannot update the focus while the C&T is still stabilizing. The estimated completion time is around 6:00 PM. The hotspot wafer looks very good and shows no tilt. Please shoot a test wafer and inspect your features before commiting all of your wafers. Use system at your own discretion. ASM-L FSE will verify tool in the morning and make updates as needed. From gsosa at snf.stanford.edu Thu Aug 6 16:02:53 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 6 Aug 2009 16:02:53 -0700 Subject: Problem asml SNF 2009-08-06 16:02:53: Update Please Read Message-ID: THe C&T is still stabilizing. The IQC focus is currently +123 nanometers. We cannot update the focus while the C&T is still stabilizing. The estimated completion time is around 6:00 PM. The hotspot wafer looks very good and shows no tilt. Please shoot a test wafer and inspect your features before commiting all of your wafers. Use system at your own discretion. ASM-L FSE will verify tool in the morning and make updates as needed. From gsosa at snf.stanford.edu Mon Aug 10 15:38:05 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 10 Aug 2009 15:38:05 -0700 Subject: Problem asml SNF 2009-08-06 16:02:53: Update Please Read Message-ID: System is stabilized. IQC updated by FSE. All in spec. From gsosa at snf.stanford.edu Mon Aug 10 15:38:45 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 10 Aug 2009 15:38:45 -0700 Subject: Problem asml SNF 2009-07-27 23:43:49: numerous "Input carrier missing" errors Message-ID: Tested OK by FSE From gsosa at snf.stanford.edu Mon Aug 10 15:40:11 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 10 Aug 2009 15:40:11 -0700 Subject: Comment asml SNF 2009-08-10 15:40:11: Update 8/10 Message-ID: 3" demo work completed by ASM-L. System converted back to 4" wafer size.System ready for use. From lindaohara at snf.stanford.edu Thu Aug 13 14:05:53 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 13 Aug 2009 14:05:53 -0700 Subject: Comment asml SNF 2009-08-13 14:05:51: Convert back to 4" Message-ID: From gsosa at snf.stanford.edu Thu Aug 13 15:21:29 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Aug 2009 15:21:29 -0700 Subject: Shutdown asml SNF 2009-08-13 15:21:28: Wafewr handling problem Message-ID: Vendors unable to complete wafer handling calibrations after converting back to 4". System fails wafer handling calibrations. Vendors will return tomorrow and continue working on problem. From lindaohara at snf.stanford.edu Fri Aug 14 09:29:24 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 14 Aug 2009 09:29:24 -0700 Subject: Shutdown asml SNF 2009-08-13 15:21:28: Wafewr handling problem Message-ID: Wafer handling cal/repro ok System ok to use From lindaohara at snf.stanford.edu Fri Aug 14 09:29:46 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 14 Aug 2009 09:29:46 -0700 Subject: Comment asml SNF 2009-08-14 09:29:45: Doing Daily Quals Message-ID: From lindaohara at snf.stanford.edu Fri Aug 14 09:31:22 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 14 Aug 2009 09:31:22 -0700 Subject: Comment asml SNF 2009-08-14 09:31:22: Systeim ok to use Message-ID: Wafer Handling cal/repro ok Okay to use From lindaohara at snf.stanford.edu Mon Aug 17 09:54:34 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Mon, 17 Aug 2009 09:54:34 -0700 Subject: Comment asml SNF 2009-08-17 09:54:33: ASML 3" Demo Message-ID: From lindaohara at snf.stanford.edu Mon Aug 17 14:35:01 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Mon, 17 Aug 2009 14:35:01 -0700 Subject: Comment asml SNF 2009-08-17 14:35:01: System ok to use Message-ID: From lindaohara at snf.stanford.edu Tue Aug 18 07:40:18 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 18 Aug 2009 07:40:18 -0700 Subject: Comment asml SNF 2009-08-18 07:40:18: ASML Demo Message-ID: From lindaohara at snf.stanford.edu Tue Aug 18 11:11:44 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 18 Aug 2009 11:11:44 -0700 Subject: Comment asml SNF 2009-08-18 11:11:43: Released 11:30 - 14:00 ASML Reservation Message-ID: ASML demo Completed From lindaohara at snf.stanford.edu Wed Aug 19 07:20:12 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 19 Aug 2009 07:20:12 -0700 Subject: Comment asml SNF 2009-08-19 07:20:11: 6" Conversion Message-ID: Aug 19th 7:20am - Aug 20th 14:30 From lindaohara at snf.stanford.edu Thu Aug 20 07:15:04 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 20 Aug 2009 07:15:04 -0700 Subject: Comment asml SNF 2009-08-20 07:15:04: 6' ASML DEMO Message-ID: From lindaohara at snf.stanford.edu Thu Aug 20 14:39:37 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 20 Aug 2009 14:39:37 -0700 Subject: Problem asml SNF 2009-08-20 14:39:37: Wafer stuck in system Message-ID: From lindaohara at snf.stanford.edu Thu Aug 20 15:31:10 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 20 Aug 2009 15:31:10 -0700 Subject: Problem asml SNF 2009-08-20 14:39:37: Wafer stuck in system Message-ID: Cycled wafer through, ok to use From joey.minh.ho at asml.com Thu Aug 20 17:03:40 2009 From: joey.minh.ho at asml.com (Joey Ho) Date: Thu, 20 Aug 2009 20:03:40 -0400 Subject: Problem asml SNF 2009-08-20 14:39:37: Wafer stuck in system In-Reply-To: <20090820223110.E4EFE18F519@smtp5.stanford.edu> References: <20090820223110.E4EFE18F519@smtp5.stanford.edu> Message-ID: <06074762BB38DC48B93C60F730B5AFA647F513C9@USWILX884.sn-us.asml.com> The root cause to the wafers being "stuck" in the system is "wafer back side contamination". Please remember to check, and if necessary clean the back side of the wafers before sending them through the ASML Stepper. The "stuck wafers" were cleaned, and then ran through the system again with no issues. Joey Minh Ho ASML CS Engineer -----Original Message----- From: lindaohara at snf.stanford.edu [mailto:lindaohara at snf.stanford.edu] Sent: Thursday, August 20, 2009 3:31 PM To: asml-pcs at snf.stanford.edu Subject: Re: Problem asml SNF 2009-08-20 14:39:37: Wafer stuck in system Cycled wafer through, ok to use -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From lindaohara at snf.stanford.edu Fri Aug 21 11:52:19 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 21 Aug 2009 11:52:19 -0700 Subject: Shutdown asml SNF 2009-08-21 11:52:18: Wafers stuck in system Message-ID: From lindaohara at snf.stanford.edu Fri Aug 21 13:45:56 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 21 Aug 2009 13:45:56 -0700 Subject: Shutdown asml SNF 2009-08-21 11:52:18: Wafers stuck in system Message-ID: testing From lindaohara at snf.stanford.edu Fri Aug 21 14:07:43 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 21 Aug 2009 14:07:43 -0700 Subject: Comment asml SNF 2009-08-21 14:07:42: System up ok to use Message-ID: Recovered wafers, wh calibration ok, and cycled wafers through ok From sdogbe at snf.stanford.edu Mon Aug 24 19:08:00 2009 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Mon, 24 Aug 2009 19:08:00 -0700 Subject: Shutdown asml SNF 2009-08-24 19:08:00: Wafer lost in system Message-ID: Wafer lost in System. From emyers at snf.stanford.edu Tue Aug 25 08:27:06 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 25 Aug 2009 08:27:06 -0700 Subject: Shutdown asml SNF 2009-08-24 19:08:00: Wafer lost in system Message-ID: Wafers had dirty backside. It was very obvious contamination. I am holding the wafers and the user will be disqualified. Ed Myers From lindaohara at snf.stanford.edu Tue Aug 25 08:36:19 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 25 Aug 2009 08:36:19 -0700 Subject: Comment asml SNF 2009-08-25 08:36:19: ASML 3D Calibration Message-ID: From lindaohara at snf.stanford.edu Tue Aug 25 10:08:34 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 25 Aug 2009 10:08:34 -0700 Subject: Comment asml SNF 2009-08-25 10:08:33: E Chuck & 3D Optics Dirty Message-ID: Found residual resist on the e chuck and had particles on the 3D optics on the e chuck. Pls be careful and check the backsides of your wafers before processing on the ASML. From lindaohara at snf.stanford.edu Wed Aug 26 07:41:09 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 26 Aug 2009 07:41:09 -0700 Subject: Comment asml SNF 2009-08-26 07:41:09: ASML 3D Calibration Message-ID: From lindaohara at snf.stanford.edu Wed Aug 26 10:45:04 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 26 Aug 2009 10:45:04 -0700 Subject: Comment asml SNF 2009-08-26 10:45:03: 3D Calibration ok Message-ID: 3D Calibration is in spec From lindaohara at snf.stanford.edu Wed Aug 26 10:46:06 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 26 Aug 2009 10:46:06 -0700 Subject: Comment asml SNF 2009-08-26 10:46:06: Release ASML Reservation from 11:00 - 14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Aug 27 09:27:04 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 27 Aug 2009 09:27:04 -0700 Subject: Comment asml SNF 2009-08-27 09:27:03: ASML Released Reservation 9:30-11:00 Message-ID: From gsosa at snf.stanford.edu Thu Aug 27 10:56:13 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:56:13 -0700 Subject: Comment asml SNF 2009-06-02 15:32:24: Up Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:56:20 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:56:20 -0700 Subject: Comment asml SNF 2009-06-07 16:55:36: Okay to use Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:56:25 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:56:25 -0700 Subject: Comment asml SNF 2009-06-07 17:44:26: System OK to Use Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:56:31 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:56:31 -0700 Subject: Comment asml SNF 2009-06-16 08:16:07: asml RR Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:56:36 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:56:36 -0700 Subject: Comment asml SNF 2009-06-17 07:57:00: ASML 3D Calibration Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:56:41 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:56:41 -0700 Subject: Comment asml SNF 2009-06-18 11:41:01: ASML 3D Calibration Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:56:52 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:56:52 -0700 Subject: Comment asml SNF 2009-06-29 16:38:19: System stabilizing Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:56:58 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:56:58 -0700 Subject: Comment asml SNF 2009-07-02 12:51:00: Deleted reservation 13:00 to 14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:57:09 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:57:09 -0700 Subject: Comment asml SNF 2009-07-15 09:49:02: Release tool 10:00 to 14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:57:13 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:57:13 -0700 Subject: Comment asml SNF 2009-07-15 10:57:58: Tool is available until 13:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:57:18 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:57:18 -0700 Subject: Comment asml SNF 2009-07-15 17:02:02: stage error Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:57:23 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:57:23 -0700 Subject: Comment asml SNF 2009-07-17 13:46:07: ASML OK to use Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:57:30 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:57:30 -0700 Subject: Comment asml SNF 2009-07-21 12:02:06: Released Reservation 12:00-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:57:36 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:57:36 -0700 Subject: Comment asml SNF 2009-07-30 08:55:41: 3" Demo Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:57:42 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:57:42 -0700 Subject: Comment asml SNF 2009-07-30 16:34:10: ASML UP Okay to use Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:57:47 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:57:47 -0700 Subject: Comment asml SNF 2009-07-31 11:38:01: 3" Demo Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:57:54 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:57:54 -0700 Subject: Comment asml SNF 2009-07-31 14:02:56: Hotspot Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:58:00 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:58:00 -0700 Subject: Comment asml SNF 2009-07-31 16:01:25: ASML UP Okay to Use Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:58:05 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:58:05 -0700 Subject: Comment asml SNF 2009-08-03 09:37:10: Cleared wafer out ASML, ok to use Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:58:10 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:58:10 -0700 Subject: Comment asml SNF 2009-08-04 12:33:17: Reservation Released from 12:30 -14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:58:15 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:58:15 -0700 Subject: Comment asml SNF 2009-08-06 12:08:13: Edge Sensor Repro Ok Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:58:20 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:58:20 -0700 Subject: Comment asml SNF 2009-08-06 12:09:45: ASML Released Aug14th 9:00-1400 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:58:49 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:58:49 -0700 Subject: Comment asml SNF 2009-08-10 15:40:11: Update 8/10 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:58:59 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:58:59 -0700 Subject: Comment asml SNF 2009-08-13 14:05:51: Convert back to 4" Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:59:04 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:59:04 -0700 Subject: Comment asml SNF 2009-08-14 09:29:45: Doing Daily Quals Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:59:09 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:59:09 -0700 Subject: Comment asml SNF 2009-08-14 09:31:22: Systeim ok to use Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:59:14 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:59:14 -0700 Subject: Comment asml SNF 2009-08-17 09:54:33: ASML 3" Demo Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:59:18 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:59:18 -0700 Subject: Comment asml SNF 2009-08-17 14:35:01: System ok to use Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:59:23 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:59:23 -0700 Subject: Comment asml SNF 2009-08-18 07:40:18: ASML Demo Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:59:28 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:59:28 -0700 Subject: Comment asml SNF 2009-08-18 11:11:43: Released 11:30 - 14:00 ASML Reservation Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:59:39 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:59:39 -0700 Subject: Comment asml SNF 2009-08-19 07:20:11: 6" Conversion Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 27 10:59:45 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:59:45 -0700 Subject: Comment asml SNF 2009-08-20 07:15:04: 6' ASML DEMO Message-ID: To Archive From lindaohara at snf.stanford.edu Thu Aug 27 13:16:06 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 27 Aug 2009 13:16:06 -0700 Subject: Comment asml SNF 2009-08-27 13:16:05: ASML Released tool, free until 14:00 Message-ID: From lindaohara at snf.stanford.edu Fri Aug 28 09:39:09 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 28 Aug 2009 09:39:09 -0700 Subject: Comment asml SNF 2009-08-28 09:39:08: ASML Released Tool Reservation 9:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Fri Aug 28 11:31:43 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 28 Aug 2009 11:31:43 -0700 Subject: Comment asml SNF 2009-08-28 11:31:42: System ok to use Message-ID: