From lindaohara at snf.stanford.edu Tue Dec 1 07:57:01 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 1 Dec 2009 07:57:01 -0800 Subject: Comment asml SNF 2009-12-01 07:57:00: ASML 3" DEMO Message-ID: From lindaohara at snf.stanford.edu Tue Dec 1 15:05:21 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 1 Dec 2009 15:05:21 -0800 Subject: Comment asml SNF 2009-12-01 15:05:20: ASML Released Reservations 16:00-18:00 Message-ID: From joho at snf.stanford.edu Tue Dec 1 15:30:19 2009 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 1 Dec 2009 15:30:19 -0800 Subject: Comment asml SNF 2009-12-01 15:30:19: ASML reservation released starting at 1530 Message-ID: ASML completed the 3in demo. The system is now configured for 4in wafers. IQC checked, and is OK. System is OK to use. - Joey Ho ASML CS Engineer From cursive at snf.stanford.edu Tue Dec 1 16:51:48 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 1 Dec 2009 16:51:48 -0800 Subject: Problem asml SNF 2009-12-01 16:51:48: energy sensor temperature out of range Message-ID: From joey.minh.ho at asml.com Tue Dec 1 22:31:55 2009 From: joey.minh.ho at asml.com (Joey Ho) Date: Wed, 2 Dec 2009 01:31:55 -0500 Subject: Problem asml SNF 2009-12-01 16:51:48: energy sensor temperature out of range In-Reply-To: <20091202005148.A38FCC994@smtp.stanford.edu> References: <20091202005148.A38FCC994@smtp.stanford.edu> Message-ID: <06074762BB38DC48B93C60F730B5AFA64C7242FA@USWILX884.sn-us.asml.com> The "energy sensor temperature out of range" message is a known bug in the software. The system is OK for production. Joey Minh Ho ASML CS Engineer Desk: (408) 325-7441 Pager: 8662694964 at archerwireless.net -----Original Message----- From: cursive at snf.stanford.edu [mailto:cursive at snf.stanford.edu] Sent: Tuesday, December 01, 2009 4:52 PM To: asml-pcs at snf.stanford.edu Subject: Problem asml SNF 2009-12-01 16:51:48: energy sensor temperature out of range -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From joho at snf.stanford.edu Wed Dec 2 09:27:36 2009 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Wed, 2 Dec 2009 09:27:36 -0800 Subject: Problem asml SNF 2009-12-01 16:51:48: energy sensor temperature out of range Message-ID: Clearning ASML Problem. "Energy Sensor Temperature Out of Range" is a software bug issue. The system was OK to use. - Joey Ho ASML CS Engineer From joho at snf.stanford.edu Wed Dec 2 09:29:12 2009 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Wed, 2 Dec 2009 09:29:12 -0800 Subject: Shutdown asml SNF 2009-12-02 09:29:11: System Down for No System Vacuum Message-ID: System is down for No System Vacuum - Joey Ho ASML CS Engineer From joho at snf.stanford.edu Wed Dec 2 10:35:58 2009 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Wed, 2 Dec 2009 10:35:58 -0800 Subject: Shutdown asml SNF 2009-12-02 09:29:11: System Down for No System Vacuum Message-ID: The facilities vacuum is now OK. The system is now OK. - Joey Ho ASML CS Engineer From lindaohara at snf.stanford.edu Thu Dec 3 10:29:05 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 3 Dec 2009 10:29:05 -0800 Subject: Comment asml SNF 2009-12-03 10:29:05: ASML DEMO Message-ID: From ywidjaja at snf.stanford.edu Fri Dec 4 06:07:35 2009 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Fri, 4 Dec 2009 06:07:35 -0800 Subject: Shutdown asml SNF 2009-12-04 06:07:35: system error Message-ID: wafer stuck in the system. From lindaohara at snf.stanford.edu Fri Dec 4 07:34:02 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 4 Dec 2009 07:34:02 -0800 Subject: Comment asml SNF 2009-12-04 07:34:01: ASML DOWN Message-ID: Wafer stuck on E-Chuck From lindaohara at snf.stanford.edu Fri Dec 4 09:00:08 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 4 Dec 2009 09:00:08 -0800 Subject: Shutdown asml SNF 2009-12-04 06:07:35: system error Message-ID: Cleared Wafer stuck on e-chuck From lindaohara at snf.stanford.edu Fri Dec 4 09:02:55 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 4 Dec 2009 09:02:55 -0800 Subject: Comment asml SNF 2009-12-04 09:02:55: ASML UP Message-ID: Took wafer that was stuck on e-chuck, off the dipod. Joey & Mark cleaned the dipod and e-chuck. Tested the system and it's up to use. From lindaohara at snf.stanford.edu Fri Dec 4 09:29:38 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 4 Dec 2009 09:29:38 -0800 Subject: Comment asml SNF 2009-12-04 09:29:38: ASML DEMO Message-ID: From cursive at snf.stanford.edu Sun Dec 6 15:19:35 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sun, 6 Dec 2009 15:19:35 -0800 Subject: Problem asml SNF 2009-12-06 15:19:34: softeare problem Message-ID: When I finished the process and ready to exchange the reticle box, the main window was crash and repeat to show "material handle start" in message window. After exit the main window and login, it works again. From bchui at snf.stanford.edu Sun Dec 6 18:52:08 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 6 Dec 2009 18:52:08 -0800 Subject: Problem asml SNF 2009-12-06 18:52:07: Input port #4 error Message-ID: Machine reported error with port #4. Had to do a soft (fast) reset in order to get my batch to start running. Then the sensor failed to sense 2 of the 6 wafers in the input cassette. (I had put them in the top 6 slots... the handler processed the fifth wafer from the top first, instead of the sixth) From kreifels at snf.stanford.edu Mon Dec 7 10:52:09 2009 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Mon, 7 Dec 2009 10:52:09 -0800 Subject: Comment asml SNF 2009-12-07 10:52:09: wafer handling Message-ID: Over the weekend it was reported that port 4 would not read all the wafers, will perform a wh health check From kreifels at snf.stanford.edu Mon Dec 7 11:01:32 2009 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Mon, 7 Dec 2009 11:01:32 -0800 Subject: Comment asml SNF 2009-12-07 11:01:31: WH findings Message-ID: Cycled 25 wafers on ports 3 and 4, (5 cycles each) no issues found. From kreifels at snf.stanford.edu Mon Dec 7 11:05:30 2009 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Mon, 7 Dec 2009 11:05:30 -0800 Subject: Problem asml SNF 2009-12-06 15:19:34: softeare problem Message-ID: From kreifels at snf.stanford.edu Mon Dec 7 11:09:08 2009 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Mon, 7 Dec 2009 11:09:08 -0800 Subject: Problem asml SNF 2009-12-06 18:52:07: Input port #4 error Message-ID: Cycled 25 wafers through port 3 and 4, 5 times each, no issues found.Tool is OK for running. MK ASML Engineer. From gyama at snf.stanford.edu Mon Dec 7 15:06:44 2009 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 7 Dec 2009 15:06:44 -0800 Subject: Problem asml SNF 2009-12-07 15:06:44: 1.0um 3612 50mj Message-ID: did not develop as normal, very under exposed normally, 50mj for 1.0um 3612 is fine From lindaohara at snf.stanford.edu Tue Dec 8 09:17:37 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 8 Dec 2009 09:17:37 -0800 Subject: Problem asml SNF 2009-12-07 15:06:44: 1.0um 3612 50mj Message-ID: Daily Quals ok, did hotspot, IQC, Uniformity, & E0. From lindaohara at snf.stanford.edu Tue Dec 8 13:12:44 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 8 Dec 2009 13:12:44 -0800 Subject: Comment asml SNF 2009-12-08 13:12:43: ASML Released Reservations thru 14:00 Message-ID: From lindaohara at snf.stanford.edu Wed Dec 9 12:03:26 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 9 Dec 2009 12:03:26 -0800 Subject: Comment asml SNF 2009-12-09 12:03:25: ASML Released Reservations 12:00-13:00 Message-ID: From lindaohara at snf.stanford.edu Thu Dec 10 08:55:35 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 10 Dec 2009 08:55:35 -0800 Subject: Problem asml SNF 2009-12-10 08:55:34: Hotspot left edge of wafer Message-ID: Will have ASML CSE clean the E-Chuck. From lindaohara at snf.stanford.edu Thu Dec 10 12:12:56 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 10 Dec 2009 12:12:56 -0800 Subject: Problem asml SNF 2009-12-10 08:55:34: Hotspot left edge of wafer Message-ID: Hotspot check ok after Mark cleaned the E-Chuck. From lindaohara at snf.stanford.edu Thu Dec 10 12:44:30 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 10 Dec 2009 12:44:30 -0800 Subject: Comment asml SNF 2009-12-10 12:44:30: ASML Released Reservations 12:30-13:30 Message-ID: From cursive at snf.stanford.edu Thu Dec 10 20:44:49 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 10 Dec 2009 20:44:49 -0800 Subject: Problem asml SNF 2009-12-10 20:44:48: wafer stuck inside Message-ID: Wafer is stuck in the P-chuck. It's supposed to shut down the machine. Put a note out of the machine. If someone knows how to fix it exactly, please try to contact me. From cursive at snf.stanford.edu Thu Dec 10 20:49:04 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 10 Dec 2009 20:49:04 -0800 Subject: Problem asml SNF 2009-12-10 20:49:03: wafers stuck inside Message-ID: wafer stuck inside when running expose without PM mark. From lindaohara at snf.stanford.edu Fri Dec 11 07:41:12 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 11 Dec 2009 07:41:12 -0800 Subject: Shutdown asml SNF 2009-12-11 07:41:12: Wafer stuck on P-Chuck Message-ID: From lindaohara at snf.stanford.edu Fri Dec 11 07:53:52 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 11 Dec 2009 07:53:52 -0800 Subject: Shutdown asml SNF 2009-12-11 07:41:12: Wafer stuck on P-Chuck Message-ID: Removed wafer that was stuck on P-Chuck From lindaohara at snf.stanford.edu Fri Dec 11 07:53:57 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 11 Dec 2009 07:53:57 -0800 Subject: Problem asml SNF 2009-12-10 20:49:03: wafers stuck inside Message-ID: From lindaohara at snf.stanford.edu Fri Dec 11 07:56:11 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 11 Dec 2009 07:56:11 -0800 Subject: Problem asml SNF 2009-12-10 20:44:48: wafer stuck inside Message-ID: Removed wafer stuck on P-Chuck. Tested wafer on granite and only moved very little. From lindaohara at snf.stanford.edu Fri Dec 11 09:23:24 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 11 Dec 2009 09:23:24 -0800 Subject: Comment asml SNF 2009-12-11 09:23:23: ASML CSEs Running Tests Message-ID: From lindaohara at snf.stanford.edu Fri Dec 11 15:12:00 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 11 Dec 2009 15:12:00 -0800 Subject: Comment asml SNF 2009-12-11 15:12:00: ASML OK to use Message-ID: IQC, Uniformity, 3D Backside Align Repro: tests ok From jwpchen at snf.stanford.edu Fri Dec 11 19:49:49 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Fri, 11 Dec 2009 19:49:49 -0800 Subject: Problem asml SNF 2009-12-11 19:49:49: leveling error Message-ID: "unexpected reply from WSXA_DetermineGlobalStageTilts", rejects wafer after P-chuck. We see the standard mark action on the right camera, but nothing on the left camera when wafer reaches E-chuck. Other errors in the logs suggest problems with tilt, leveling, red laser. Next user observes same problems From rik at snf.stanford.edu Fri Dec 11 20:51:17 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Fri, 11 Dec 2009 20:51:17 -0800 Subject: Shutdown asml SNF 2009-12-11 20:51:17: System in a very weird state Message-ID: Tried simplest test possible (putting alignment marks down) with no luck. Did a System-Startup as well. All systems came up as "Ready" without a problem. System currently unusable. The wafer is sitting on every stage for a very long time. Took it 10+ minutes to go through the whole system. From gsosa at snf.stanford.edu Fri Dec 11 23:06:02 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Dec 2009 23:06:02 -0800 Subject: Comment asml SNF 2009-11-17 09:22:29: ASML Running Tests Message-ID: To Archives From gsosa at snf.stanford.edu Fri Dec 11 23:06:18 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Dec 2009 23:06:18 -0800 Subject: Comment asml SNF 2009-11-20 14:33:20: ASML Stepper Update Message-ID: To Archives From gsosa at snf.stanford.edu Fri Dec 11 23:06:25 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Dec 2009 23:06:25 -0800 Subject: Comment asml SNF 2009-11-20 16:21:41: Stepper Update 11/20 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Dec 11 23:06:30 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Dec 2009 23:06:30 -0800 Subject: Comment asml SNF 2009-11-21 16:07:53: Stepper Update 11/21 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Dec 11 23:06:38 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Dec 2009 23:06:38 -0800 Subject: Comment asml SNF 2009-11-21 21:41:13: Stepper Update 11/21 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Dec 11 23:06:48 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Dec 2009 23:06:48 -0800 Subject: Comment asml SNF 2009-12-01 07:57:00: ASML 3" DEMO Message-ID: To Archives From gsosa at snf.stanford.edu Fri Dec 11 23:06:54 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Dec 2009 23:06:54 -0800 Subject: Comment asml SNF 2009-12-01 15:05:20: ASML Released Reservations 16:00-18:00 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Dec 11 23:06:59 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Dec 2009 23:06:59 -0800 Subject: Comment asml SNF 2009-12-03 10:29:05: ASML DEMO Message-ID: To Archives From gsosa at snf.stanford.edu Fri Dec 11 23:07:09 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Dec 2009 23:07:09 -0800 Subject: Comment asml SNF 2009-12-01 15:30:19: ASML reservation released starting at 1530 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Dec 11 23:07:15 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Dec 2009 23:07:15 -0800 Subject: Comment asml SNF 2009-12-08 13:12:43: ASML Released Reservations thru 14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Dec 11 23:07:20 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Dec 2009 23:07:20 -0800 Subject: Comment asml SNF 2009-12-09 12:03:25: ASML Released Reservations 12:00-13:00 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Dec 11 23:07:27 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Dec 2009 23:07:27 -0800 Subject: Comment asml SNF 2009-12-10 12:44:30: ASML Released Reservations 12:30-13:30 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Dec 11 23:15:04 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Dec 2009 23:15:04 -0800 Subject: Shutdown asml SNF 2009-12-11 20:51:17: System in a very weird state Message-ID: Verified Users problem with a test job. Level sensor errors immediateley upon starting the batch, 10+ minutes to flush wafer throught the system. Shutting down application and unix software did not resolve the problem. Did a full system power down/power up and reboot of system software and hardware. Tested system with same job. All OK, no leveling issues. Cycled 10 wafers through the system with no problems. Performed daily test queue and verified all critical parameters in spec( Lamp uniformity, focus, tilts, alignment). System back up and ready to use. From gsosa at snf.stanford.edu Fri Dec 11 23:15:11 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Dec 2009 23:15:11 -0800 Subject: Problem asml SNF 2009-12-11 19:49:49: leveling error Message-ID: Verified Users problem with a test job. Level sensor errors immediateley upon starting the batch, 10+ minutes to flush wafer throught the system. Shutting down application and unix software did not resolve the problem. Did a full system power down/power up and reboot of system software and hardware. Tested system with same job. All OK, no leveling issues. Cycled 10 wafers through the system with no problems. Performed daily test queue and verified all critical parameters in spec( Lamp uniformity, focus, tilts, alignment). System back up and ready to use. From gsosa at snf.stanford.edu Fri Dec 11 23:16:15 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Dec 2009 23:16:15 -0800 Subject: Comment asml SNF 2009-12-11 23:16:14: System status 12/11 Message-ID: System is Up. Verified Users problem with a test job. Level sensor errors immediateley upon starting the batch, 10+ minutes to flush wafer throught the system. Shutting down application and unix software did not resolve the problem. Did a full system power down/power up and reboot of system software and hardware. Tested system with same job. All OK, no leveling issues. Cycled 10 wafers through the system with no problems. Performed daily test queue and verified all critical parameters in spec( Lamp uniformity, focus, tilts, alignment). System back up and ready to use. From kreifels at snf.stanford.edu Tue Dec 15 10:59:24 2009 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Tue, 15 Dec 2009 10:59:24 -0800 Subject: Comment asml SNF 2009-12-15 10:59:24: tool avail during lunch Message-ID: The will be available for students from 11-1pm today 12/15/09 From kreifels at snf.stanford.edu Wed Dec 16 10:34:37 2009 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Wed, 16 Dec 2009 10:34:37 -0800 Subject: Comment asml SNF 2009-12-16 10:34:36: Annual PM Message-ID: Still workiing on the annual PM, will leave to asml company party will continue on pm 5/17/09 From kreifels at snf.stanford.edu Thu Dec 17 07:35:15 2009 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Thu, 17 Dec 2009 07:35:15 -0800 Subject: Comment asml SNF 2009-12-17 07:35:14: annual PM Message-ID: Starting annual PM, will stop when purge hood team arrives. From kreifels at snf.stanford.edu Fri Dec 18 15:40:19 2009 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Fri, 18 Dec 2009 15:40:19 -0800 Subject: Comment asml SNF 2009-12-18 15:40:19: ASML shut down Message-ID: Annual pm is 99% completed minus the metrology setup. Gary will turn the system back on 12/30/09