Problem asml SNF 2009-12-01 16:51:48: energy sensor temperature out of range

Joey Ho joey.minh.ho at asml.com
Tue Dec 1 22:31:55 PST 2009


The "energy sensor temperature out of range" message is a known bug in the software. The system is OK for production.


Joey Minh Ho

ASML CS Engineer
Desk: (408) 325-7441
Pager: 8662694964 at archerwireless.net


-----Original Message-----
From: cursive at snf.stanford.edu [mailto:cursive at snf.stanford.edu] 
Sent: Tuesday, December 01, 2009 4:52 PM
To: asml-pcs at snf.stanford.edu
Subject: Problem asml SNF 2009-12-01 16:51:48: energy sensor temperature out of range




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