Problem asml SNF 2009-12-01 16:51:48: energy sensor temperature out of range
joey.minh.ho at asml.com
Tue Dec 1 22:31:55 PST 2009
The "energy sensor temperature out of range" message is a known bug in the software. The system is OK for production.
Joey Minh Ho
ASML CS Engineer
Desk: (408) 325-7441
Pager: 8662694964 at archerwireless.net
From: cursive at snf.stanford.edu [mailto:cursive at snf.stanford.edu]
Sent: Tuesday, December 01, 2009 4:52 PM
To: asml-pcs at snf.stanford.edu
Subject: Problem asml SNF 2009-12-01 16:51:48: energy sensor temperature out of range
The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt.
More information about the asml-pcs