Comment asml SNF 2009-12-04 09:02:55: ASML UP

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Fri Dec 4 09:02:55 PST 2009


Took wafer that was stuck on e-chuck, off the dipod. Joey & Mark 
cleaned the dipod and e-chuck.  Tested the system and it's up to use. 




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