Problem asml SNF 2009-12-06 18:52:07: Input port #4 error

bchui at bchui at
Sun Dec 6 18:52:08 PST 2009

Machine reported error with port #4.  Had to do a soft (fast) reset in order to get my batch to start running.  Then the sensor failed to sense 2 of the 6 wafers in the input cassette.  (I had put them in the top 6 slots... the handler processed the fifth wafer from the top first, instead of the sixth)

More information about the asml-pcs mailing list