Problem asml SNF 2009-12-06 18:52:07: Input port #4 error

kreifels at snf.stanford.edu kreifels at snf.stanford.edu
Mon Dec 7 11:09:08 PST 2009


Cycled 25 wafers through port 3 and 4, 5 times each, no issues found.Tool is OK for running. MK ASML Engineer.




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