Problem asml SNF 2009-12-10 20:44:48: wafer stuck inside

cursive at snf.stanford.edu cursive at snf.stanford.edu
Thu Dec 10 20:44:49 PST 2009

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Wafer is stuck in the P-chuck. It's supposed to shut down the machine.
Put a note out of the machine. If someone knows how to fix it exactly, please try to contact me.

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