Problem asml SNF 2009-12-11 19:49:49: leveling error

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Fri Dec 11 19:49:49 PST 2009


"unexpected reply from WSXA_DetermineGlobalStageTilts", rejects wafer after P-chuck. We see the standard mark action on the right camera, but nothing on the left camera when wafer reaches E-chuck. Other errors in the logs suggest problems with tilt, leveling, red laser. Next user observes same problems




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