Shutdown asml SNF 2009-12-11 20:51:17: System in a very weird state

rik at rik at
Fri Dec 11 20:51:17 PST 2009

Tried simplest test possible (putting alignment marks down) with no luck. Did a System-Startup as well. All systems came up as "Ready" without a problem. System currently unusable.
The wafer is sitting on every stage for a very long time. Took it 10+ minutes to go through the whole system. 

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