Problem asml SNF 2009-12-11 19:49:49: leveling error

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Dec 11 23:15:11 PST 2009


Verified Users problem with a test job. Level sensor errors immediateley upon starting the batch, 10+ minutes to flush wafer throught the system. Shutting down application and unix software did not resolve the problem. Did a full system power down/power up and reboot of system software and hardware. Tested system with same job. All OK, no leveling issues. Cycled 10 wafers through the system with no problems. Performed daily test queue and verified all critical parameters in spec( Lamp uniformity, focus, tilts, alignment). System back up and ready to use.




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