From lindaohara at snf.stanford.edu Tue Feb 3 08:37:25 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 3 Feb 2009 08:37:25 -0800 Subject: Comment asml SNF 2009-02-03 08:37:24: PM and Troubleshooting OCU Monitor Message-ID: From gsosa at snf.stanford.edu Tue Feb 3 15:48:29 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 3 Feb 2009 15:48:29 -0800 Subject: Comment asml SNF 2009-02-03 08:37:24: PM and Troubleshooting OCU Monitor Message-ID: Vendor will continue PM tomorrow. System is up and ready to use. From gsosa at snf.stanford.edu Wed Feb 4 16:10:32 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 4 Feb 2009 16:10:32 -0800 Subject: Comment asml SNF 2009-02-04 16:10:31: Tool is up! 2/4/09 Message-ID: Vendors completed work for today. System is OK to use. From jsuarez at snf.stanford.edu Thu Feb 5 10:56:11 2009 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Thu, 5 Feb 2009 10:56:11 -0800 Subject: Problem asml SNF 2009-02-05 10:56:11: non-uniformity Message-ID: focus/exposure non uniformity? From gsosa at snf.stanford.edu Thu Feb 5 16:02:59 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 Feb 2009 16:02:59 -0800 Subject: Problem asml SNF 2009-02-05 10:56:11: non-uniformity Message-ID: Vendor completed the monthly PM. Exposure chuck cleaned- Hot spot test came out good. Focus/tilt and red/blue checked and updated. System ready to use. From gsosa at snf.stanford.edu Thu Feb 5 16:09:05 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 Feb 2009 16:09:05 -0800 Subject: Problem asml SNF 2009-01-28 13:01:18: Right side monitor non-op Message-ID: Vendor troubleshot and got right side monitor to work. Will continue to watch the monitor for the scrolling pattern. From jsuarez at snf.stanford.edu Fri Feb 6 08:26:20 2009 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Fri, 6 Feb 2009 08:26:20 -0800 Subject: Problem asml SNF 2009-02-06 08:26:20: image tilt Message-ID: From gsosa at snf.stanford.edu Fri Feb 6 10:16:01 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Feb 2009 10:16:01 -0800 Subject: Shutdown asml SNF 2009-02-06 10:16:01: image tilt Message-ID: Vendors are resetting up focus and tilt. From gsosa at snf.stanford.edu Fri Feb 6 16:35:24 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Feb 2009 16:35:24 -0800 Subject: Problem asml SNF 2009-02-06 08:26:20: image tilt Message-ID: FSE's checked and updated coarse and fine focussing systems and zeroed out the system reference state. Exposed a hotspot test wafer which is very sensitive to out of focus contitions. The hotspot wafer looked very good. System is up and ready to use. If you can, Please shoot a test wafer before exposing all of your wafers and inspect carefully. Please report any problems the you encounter in coral. Thanks. From gsosa at snf.stanford.edu Fri Feb 6 16:35:35 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Feb 2009 16:35:35 -0800 Subject: Shutdown asml SNF 2009-02-06 10:16:01: image tilt Message-ID: FSE's checked and updated coarse and fine focussing systems and zeroed out the system reference state. Exposed a hotspot test wafer which is very sensitive to out of focus contitions. The hotspot wafer looked very good. System is up and ready to use. If you can, Please shoot a test wafer before exposing all of your wafers and inspect carefully. Please report any problems the you encounter in coral. Thanks. From gsosa at snf.stanford.edu Fri Feb 6 16:36:17 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Feb 2009 16:36:17 -0800 Subject: Comment asml SNF 2009-02-06 16:36:17: Tool Update 2/6/09 Message-ID: FSE's checked and updated coarse and fine focussing systems and zeroed out the system reference state. Exposed a hotspot test wafer which is very sensitive to out of focus contitions. The hotspot wafer looked very good. System is up and ready to use. If you can, Please shoot a test wafer before exposing all of your wafers and inspect carefully. Please report any problems the you encounter in coral. Thanks. From rostam at snf.stanford.edu Tue Feb 10 20:34:19 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Tue, 10 Feb 2009 20:34:19 -0800 Subject: Problem asml SNF 2009-02-10 20:34:18: ERROR: FT_0101 Message-ID: received following error in the log ERROR: FT_0101 Error in function FTIN_ft_starr The wafers were exposed by the machine From mahnaz at snf.stanford.edu Wed Feb 11 15:23:54 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 11 Feb 2009 15:23:54 -0800 Subject: Problem asml SNF 2009-02-11 15:23:53: 3D verification failed Message-ID: FSE will continue to work on it tomorrow. From mahnaz at snf.stanford.edu Thu Feb 12 16:45:03 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 12 Feb 2009 16:45:03 -0800 Subject: Problem asml SNF 2009-02-12 16:45:02: 3D is down Message-ID: From gsosa at snf.stanford.edu Fri Feb 13 18:27:20 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 13 Feb 2009 18:27:20 -0800 Subject: Comment asml SNF 2009-02-13 18:27:20: System is up 2/13/09 !! Message-ID: System is back up. System had image tilt and focus issues today. Also 3D align not working correctly. FSE's from ASML complete focus setup and redefined the system reference state. They also did a calibration of all 3D align parameters and updated machine constants as needed. 3D align system is much improved but still needs some fine tuning. ASML will schedule time at a later date to do this work. 3D align is OK to use. System is up for front and backside align. From gsosa at snf.stanford.edu Fri Feb 13 18:27:37 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 13 Feb 2009 18:27:37 -0800 Subject: Problem asml SNF 2009-02-11 15:23:53: 3D verification failed Message-ID: System is back up. System had image tilt and focus issues today. Also 3D align not working correctly. FSE's from ASML complete focus setup and redefined the system reference state. They also did a calibration of all 3D align parameters and updated machine constants as needed. 3D align system is much improved but still needs some fine tuning. ASML will schedule time at a later date to do this work. 3D align is OK to use. System is up for front and backside align. From gsosa at snf.stanford.edu Fri Feb 13 18:27:43 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 13 Feb 2009 18:27:43 -0800 Subject: Problem asml SNF 2009-02-12 16:45:02: 3D is down Message-ID: System is back up. System had image tilt and focus issues today. Also 3D align not working correctly. FSE's from ASML complete focus setup and redefined the system reference state. They also did a calibration of all 3D align parameters and updated machine constants as needed. 3D align system is much improved but still needs some fine tuning. ASML will schedule time at a later date to do this work. 3D align is OK to use. System is up for front and backside align. From gsosa at snf.stanford.edu Fri Feb 13 18:27:56 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 13 Feb 2009 18:27:56 -0800 Subject: Problem asml SNF 2009-02-10 20:34:18: ERROR: FT_0101 Message-ID: System OK. From mahnaz at snf.stanford.edu Tue Feb 17 17:09:56 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 17 Feb 2009 17:09:56 -0800 Subject: Comment asml SNF 2009-02-17 17:09:56: jammed Message-ID: system jammed, reinitialized the system twice. From rshyam at snf.stanford.edu Wed Feb 18 02:25:49 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Wed, 18 Feb 2009 02:25:49 -0800 Subject: Problem asml SNF 2009-02-18 02:25:49: CT not initialized Message-ID: Tried Full Start-up. Contamination and Temperature Control failed to initialize. Could not start batch control. Could not run any wafers. From lindaohara at snf.stanford.edu Wed Feb 18 08:21:34 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 18 Feb 2009 08:21:34 -0800 Subject: Shutdown asml SNF 2009-02-18 08:21:34: C & T failed during Full Start up Message-ID: From mahnaz at snf.stanford.edu Wed Feb 18 16:07:27 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 18 Feb 2009 16:07:27 -0800 Subject: Problem asml SNF 2009-02-18 16:07:27: C&T error Message-ID: he system was giving C&T error yesterday which is caused by low level water. The low level water caused the TCU to shut down. The TCU shut down tripped the breaker/ relay. FSE came in and this afternoon the TCU was turned back on. The system needs to stabilizes over night and the IQC and focus needs to be checked in the morning. From emyers at snf.stanford.edu Thu Feb 19 10:16:51 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 19 Feb 2009 10:16:51 -0800 Subject: Shutdown asml SNF 2009-02-18 08:21:34: C & T failed during Full Start up Message-ID: Corrected and performance verified. From mahnaz at snf.stanford.edu Thu Feb 19 15:58:59 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 19 Feb 2009 15:58:59 -0800 Subject: Problem asml SNF 2009-02-18 16:07:27: C&T error Message-ID: The system is up and C& T issues are resolved, IQC is good and focus ad hot spot has been tested and all with in spec. From mahnaz at snf.stanford.edu Thu Feb 19 15:59:09 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 19 Feb 2009 15:59:09 -0800 Subject: Problem asml SNF 2009-02-18 02:25:49: CT not initialized Message-ID: The system is up and C& T issues are resolved, IQC is good and focus ad hot spot has been tested and all with in spec. From mahnaz at snf.stanford.edu Thu Feb 19 15:59:19 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 19 Feb 2009 15:59:19 -0800 Subject: Comment asml SNF 2009-02-17 17:09:56: jammed Message-ID: noted From mahnaz at snf.stanford.edu Thu Feb 19 16:07:19 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 19 Feb 2009 16:07:19 -0800 Subject: Problem asml SNF 2009-02-19 16:07:18: 3D Caliberation Message-ID: 3D is up but two branches 1 and 2 are slightly out of spec. Asml FSE will resume work on Tuesday 24th. Very critical work lets either wait or discuss the situation. From wessmith at snf.stanford.edu Fri Feb 20 21:32:54 2009 From: wessmith at snf.stanford.edu (wessmith at snf.stanford.edu) Date: Fri, 20 Feb 2009 21:32:54 -0800 Subject: Problem asml SNF 2009-02-20 21:32:53: Initial Carrier Inspection Failed Message-ID: I have gotten the "Initial Carrier Inspection Failed on Port(s) 3" a few times. The machine says to re-initialise wafer handling. After re-initialising wafer handling, logging out and logging back in, I've had some success running wafers. However, the problem seems to occur more frequently. From wessmith at snf.stanford.edu Fri Feb 20 21:42:35 2009 From: wessmith at snf.stanford.edu (wessmith at snf.stanford.edu) Date: Fri, 20 Feb 2009 21:42:35 -0800 Subject: Problem asml SNF 2009-02-20 21:42:35: Wafer Handling failed to re-initialise Message-ID: When trying to re-initialise wafer handling, I got an error stating "WH driver function returned error. Description 'WSHXA_RPL_SYSTEM_ERROR' line 182 in CHWHfuncs.c" The system is inoperable at the moment, but I didn't shut it down in case someone knows how to handle this error. From grahamab at snf.stanford.edu Sat Feb 21 18:07:07 2009 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sat, 21 Feb 2009 18:07:07 -0800 Subject: Comment asml SNF 2009-02-21 18:07:06: system reset, wafer handling okay Message-ID: someone reset the system today and said it worked fine for them. no problems for me so far. From gsosa at snf.stanford.edu Wed Feb 25 11:49:52 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Feb 2009 11:49:52 -0800 Subject: Comment asml SNF 2009-02-25 11:49:51: Hotspot 2/25/09 Message-ID: Hotspot test wafer indicates a hotspot in the upper/left quadrant of wafer. Cleaned the e-table surface with cleaning stone. Re-test came out good. From bchui at snf.stanford.edu Wed Feb 25 20:40:04 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Wed, 25 Feb 2009 20:40:04 -0800 Subject: Problem asml SNF 2009-02-25 20:40:03: Wafer handler error Message-ID: When trying to start running a batch, gave error "Carrier inspection failed on Port 3", forcing me to abort batch. (Also some message about low optical sensor level.) Previous user reported same problem; he let me have a go at it but with same result. From wessmith at snf.stanford.edu Wed Feb 25 21:22:24 2009 From: wessmith at snf.stanford.edu (wessmith at snf.stanford.edu) Date: Wed, 25 Feb 2009 21:22:24 -0800 Subject: Problem asml SNF 2009-02-25 21:22:23: Wafer Handling Error Message-ID: Same error as reported above. The error states that the carrier inspection failed on port 3 (output port). I tried re-initializing the wafer hanling, but this did not work. Other users have restarted the machine and this seemed to help, but I'm not comfortable with that procedure yet. From gsosa at snf.stanford.edu Fri Feb 27 13:39:46 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 27 Feb 2009 13:39:46 -0800 Subject: Comment asml SNF 2009-02-27 13:39:45: Hotspot 022709 Message-ID: 1 hotspot in lower right quadrant near major flat. Cleaned the E-table surface with special tool. Re-test came out good. Recheck IQC- All OK. From gsosa at snf.stanford.edu Fri Feb 27 13:50:05 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 27 Feb 2009 13:50:05 -0800 Subject: Problem asml SNF 2009-02-20 21:32:53: Initial Carrier Inspection Failed Message-ID: Suspect that this was due to the laser for the wafer inspection sensor not being activated. Checked and retightened the hinges on output port (Port 3). Also adjusted the port cover latch( It was a bit too loose). Tested carrier inspection several times. Looks OK now. Please continue to report any problems in coral. From gsosa at snf.stanford.edu Fri Feb 27 13:50:52 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 27 Feb 2009 13:50:52 -0800 Subject: Problem asml SNF 2009-02-25 20:40:03: Wafer handler error Message-ID: Suspect that this was due to the laser for the wafer inspection sensor not being activated. Checked and retightened the hinges on output port (Port 3). Also adjusted the port cover latch( It was a bit too loose). Tested carrier inspection several times. Looks OK now. Please continue to report any problems in coral. From gsosa at snf.stanford.edu Fri Feb 27 13:50:57 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 27 Feb 2009 13:50:57 -0800 Subject: Problem asml SNF 2009-02-25 21:22:23: Wafer Handling Error Message-ID: Suspect that this was due to the laser for the wafer inspection sensor not being activated. Checked and retightened the hinges on output port (Port 3). Also adjusted the port cover latch( It was a bit too loose). Tested carrier inspection several times. Looks OK now. Please continue to report any problems in coral. From gsosa at snf.stanford.edu Fri Feb 27 13:51:19 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 27 Feb 2009 13:51:19 -0800 Subject: Problem asml SNF 2009-02-20 21:42:35: Wafer Handling failed to re-initialise Message-ID: Suspect that this was due to the laser for the wafer inspection sensor not being activated. Checked and retightened the hinges on output port (Port 3). Also adjusted the port cover latch( It was a bit too loose). Tested carrier inspection several times. Looks OK now. Please continue to report any problems in coral.