Problem asml SNF 2009-02-05 10:56:11: non-uniformity

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Feb 5 16:02:59 PST 2009

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Vendor completed the monthly PM. Exposure chuck cleaned- Hot spot test came out good. Focus/tilt and red/blue checked and updated. System ready to use.

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