Problem asml SNF 2009-02-06 08:26:20: image tilt

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Feb 6 16:35:24 PST 2009


FSE's checked and updated coarse and fine focussing systems and zeroed out the system reference state. Exposed a hotspot test wafer which is very sensitive to out of focus contitions. The hotspot wafer looked very good. System is up and ready to use. If you can, Please shoot a test wafer before exposing all of your wafers and inspect carefully. Please report any problems the you encounter in coral.  Thanks.  




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