Problem asml SNF 2009-02-06 08:26:20: image tilt

gsosa at gsosa at
Fri Feb 6 16:35:24 PST 2009

FSE's checked and updated coarse and fine focussing systems and zeroed out the system reference state. Exposed a hotspot test wafer which is very sensitive to out of focus contitions. The hotspot wafer looked very good. System is up and ready to use. If you can, Please shoot a test wafer before exposing all of your wafers and inspect carefully. Please report any problems the you encounter in coral.  Thanks.  

More information about the asml-pcs mailing list