Problem asml SNF 2009-02-10 20:34:18: ERROR: FT_0101

rostam at snf.stanford.edu rostam at snf.stanford.edu
Tue Feb 10 20:34:19 PST 2009

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received following error in the log
ERROR: FT_0101
Error in function FTIN_ft_starr
The wafers were exposed by the machine

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