Comment asml SNF 2009-02-13 18:27:20: System is up 2/13/09 !!

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Feb 13 18:27:20 PST 2009


System is back up. System had image tilt and focus issues today. Also 3D align not working correctly. FSE's from ASML complete focus setup and redefined the system reference state. They also did a calibration of all 3D align parameters and updated machine constants as needed.  3D align system is much improved but still needs some fine tuning. ASML will schedule time at a later date to do this work. 3D align is OK to use. System is up for front and backside align. 




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