Problem asml SNF 2009-02-18 02:25:49: CT not initialized

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Wed Feb 18 02:25:49 PST 2009


Tried Full Start-up. Contamination and Temperature Control failed to initialize.
Could not start batch control. Could not run any wafers.




More information about the asml-pcs mailing list