Problem asml SNF 2009-02-18 16:07:27: C&T error

mahnaz at mahnaz at
Wed Feb 18 16:07:27 PST 2009

he system was giving  C&T error yesterday which is caused by low level water. The low level water caused the TCU to shut down. The TCU shut down tripped the breaker/ relay.
FSE came in and  this afternoon the TCU was turned back on. The system needs to stabilizes over night and the IQC and focus needs to be checked in the morning.

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