Problem asml SNF 2009-02-20 21:32:53: Initial Carrier Inspection Failed

wessmith at wessmith at
Fri Feb 20 21:32:54 PST 2009

I have gotten the "Initial Carrier Inspection Failed on Port(s) 3" a few times. The machine says to re-initialise wafer handling. After re-initialising wafer handling, logging out and logging back in, I've had some success running wafers. However, the problem seems to occur more frequently.

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