Problem asml SNF 2009-02-20 21:42:35: Wafer Handling failed to re-initialise

wessmith at snf.stanford.edu wessmith at snf.stanford.edu
Fri Feb 20 21:42:35 PST 2009


When trying to re-initialise wafer handling, I got an error stating "WH driver function returned error. Description 'WSHXA_RPL_SYSTEM_ERROR' line 182 in CHWHfuncs.c" 
The system is inoperable at the moment, but I didn't shut it down in case someone knows how to handle this error.




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