Comment asml SNF 2009-02-25 11:49:51: Hotspot 2/25/09

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Feb 25 11:49:52 PST 2009

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Hotspot test wafer indicates a hotspot in the upper/left quadrant of wafer. Cleaned the e-table surface with cleaning stone. Re-test came out good.

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