Problem asml SNF 2009-02-25 20:40:03: Wafer handler error

bchui at snf.stanford.edu bchui at snf.stanford.edu
Wed Feb 25 20:40:04 PST 2009


When trying to start running a batch, gave error "Carrier inspection failed on Port 3", forcing me to abort batch. (Also some message about low optical sensor level.) Previous user reported same problem; he let me have a go at it but with same result.




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