Problem asml SNF 2009-02-25 21:22:23: Wafer Handling Error

wessmith at wessmith at
Wed Feb 25 21:22:24 PST 2009

Same error as reported above. The error states that the carrier inspection failed on port 3 (output port). I tried re-initializing the wafer hanling, but this did not work. Other users have restarted the machine and this seemed to help, but I'm not comfortable with that procedure yet.

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