Comment asml SNF 2009-02-27 13:39:45: Hotspot 022709

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Feb 27 13:39:46 PST 2009

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1 hotspot in lower right quadrant near major flat. Cleaned the E-table surface with special tool. Re-test came out good. Recheck IQC- All OK.

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